Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads
Jan 1, 2024·,,
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1 min read
J. Choi
J. Noh
H. Choi
Yoon Yong-Jin
W. Park
Type
Publication
International Journal of Precision Engineering and Manufacturing-Green Technology
J. Choi, J. Noh, H. Choi, Y. -J. Yoon, W. Park, (2024), Characterizing the Performance of a Resonance-Based MEMS Particle Sensor with Glass Beads, International Journal of Precision Engineering and Manufacturing-Green Technology.
