An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on- insulator wafer
Jan 1, 2017·,,
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1 min read
A.J. Teo
H. Li
S.H. Tan
Yoon Yong-Jin
Teo, A. J., Li, H., Tan, S. H., & Yoon, Y. J. (2017). An optical MEMS accelerometer fabricated using double-sided deep reactive ion etching on silicon-on- insulator wafer. Journal of Micromechanics and Microengineering, 27(6), 067001.
