A novel checker-patterned AlN MEMS resonator as gravimetric sensor
Jan 1, 2013·
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1 min read
A. Heidari
Yoon Yong-Jin
M.I. Lee
L. Khine
M.K. Park
J.M.L. Tsai
Heidari, A., Yoon, Y. J., Lee, M. I., Khine, L., Park, M. K., & Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors and Actuators A: Physical, 189, 298-306.
