M.I. Lee | Just Do it Labhttps://jdl.kaist.ac.kr/authors/m.i.-lee/M.I. LeeHugo Blox Builder (https://hugoblox.com)en-usTue, 01 Jan 2013 00:00:00 +0000A novel checker-patterned AlN MEMS resonator as gravimetric sensorhttps://jdl.kaist.ac.kr/publications/2013-a-novel-checker-patterned-aln-mems-resonator-as-gravimetric/Tue, 01 Jan 2013 00:00:00 +0000https://jdl.kaist.ac.kr/publications/2013-a-novel-checker-patterned-aln-mems-resonator-as-gravimetric/<p>Heidari, A., Yoon, Y. J., Lee, M. I., Khine, L., Park, M. K., &amp; Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors and Actuators A: Physical, 189, 298-306.</p>