A novel checker-patterned AlN MEMS resonator as gravimetric sensor
Heidari, A., Yoon, Y. J., Lee, M. I., Khine, L., Park, M. K., & Tsai, J. M. L. (2013). A novel checker-patterned AlN MEMS resonator as gravimetric sensor. Sensors and Actuators A: …
A. Heidari